Netherlands – Microelectronic machinery and apparatus and microsystems – Metrology SEM+FIB system

[TED 519634-2026] Netherlands – Microelectronic machinery and apparatus and microsystems – Metrology SEM+FIB system Buyer: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO CPV: 31712000, 38900000, 31712000, 38900000 Estimated value: 1300000.0 EUR The main purpose of this FIB/SEM equipment is to perform material milling (cutting), 3D characterization, and cross section analysis of epitaxially grown InP, InGaAs, InAlGaAs and InGaAsP layers on InP substrates. The structures may also contain polymer-based planarization layers, SiOx or SiNx dielectric layers and TiPtAu or NiGeAu metal layers. Levering van één SEM +FIB systeem